宇航计测技术 ›› 2013, Vol. 33 ›› Issue (5): 19-22.doi: 10.12060/j.issn.1000-7202.2013.05.04

• 论文 • 上一篇    下一篇

自动阻抗调配器的校准技术探讨

吴爱华1；刘晨1；栾鹏1；孙晓颖1；梁法国1；郑延秋1   

  1. 1、中国电子科技集团公司第十三研究所，河北石家庄 050051
  • 出版日期:2013-10-15 发布日期:2013-10-15

Explore on Calibration Technology of Automatic Tuner

WU Ai-hua1；LIU Chen1；LUAN Peng1；SUN Xiao-ying1；LIANG Fa-guo1；ZHENG Yan-qiu1   

  1. 1、the 13th Research Institute of China Electronics Technology Group Corporation, Shijiazhuang, Hebei 050051
  • Online:2013-10-15 Published:2013-10-15

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摘要： 自动阻抗调配器在微电子行业应用越来越广泛，但是目前国内还没有计量技术机构开展该类仪器的计量校准工作，本文介绍了其机械结构、工作原理，设计了控制模型，组建了校准系统，实现了主要参数矢量重复性、驻波比和插入损耗的校准工作。

关键词: 阻抗调配器, 矢量重复性, 驻波比, 插入损耗

Abstract: Automatic tuner is widely used more and more in the microelectronics industry, But there are no such measurement institutions to carry out the calibration work of tuner. This paper describes the mechanical structure, working principle and design of the control model, set up a calibration system to achieve calibration work of the main parameter vector repeatability, VSWR and insertion loss.

Key words: Automatic tuner, Vector repeatability, VSWR, Insertion loss

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